Thermal Field Emitters
Schottky emission, a form of thermal field emission, is the leading electron source technology used in our advanced electron beam equipment. The most common applications of Schottky emissions are seen in high resolution SEM, TEM, e-beam lithography, and Auger systems.
Advantages
- Easy to use
- Long source life
- Small virtual source size
- High brightness
- High stability
- Low noise
Liquid Metal Ion Sources (LMIS)
LMIS is the answer to high resolution, focused ion beam (FIB) imaging, nanofabrication, depth profiling, SIMS*, ion doping and ion beam lithography. Thermo Fisher Scientific uses LMIS in a variety of configurations: FIB columns, FIB systems, and DualBeam systems.
Advantages
- High angular intensity
- Stable emission process